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SEC Edgar

AXCELIS TECHNOLOGIES INC

SIC 3559 · Special Industry Machinery, NEC
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AXCELIS TECHNOLOGIES INC

CIK:0001113232|SEC Filings

PLANS OF ORGANIZATION

EX-2.1
tm2527661d2_ex2-1.htm
2025-10-01T00:00:00Z
EX-2.1
tm2527661d1_ex2-1.htm
2025-10-01T00:00:00Z
EX-2.1
a14-19633_1ex2d1.htm
2014-11-06T00:00:00Z
EX-2.2
a2223440zex-2_2.htm
2015-03-11T00:00:00Z
EX-2.2
ex2-2.txt
2000-06-30T00:00:00Z
EX-2.1
ex2-1.txt
2000-06-30T00:00:00Z
EX-2.3
ex2-3.txt
2000-06-30T00:00:00Z
EX-2.4
ex2-4.txt
2000-06-30T00:00:00Z
EX-2.5
ex2-5.txt
2000-06-30T00:00:00Z
EX-2.6
ex2-6.txt
2000-06-30T00:00:00Z
EX-2.7
ex2-7.txt
2000-06-30T00:00:00Z
EX-2.8
ex2-8.txt
2000-06-30T00:00:00Z
EX-2.1
0002.txt
2000-06-19T00:00:00Z
EX-2.7
0007.txt
2000-06-15T00:00:00Z
EX-2.1
0002.txt
2000-06-15T00:00:00Z
EX-2.2
0003.txt
2000-06-15T00:00:00Z
EX-2.6
0006.txt
2000-06-15T00:00:00Z
EX-2.4
0005.txt
2000-06-15T00:00:00Z
EX-2.3
0004.txt
2000-06-15T00:00:00Z
EX-2.9
0008.txt
2000-06-15T00:00:00Z