| ACMR | ACM Research, Inc. | Dec 31 |
| ASYS | AMTECH SYSTEMS INC | Sep 30 |
| ASML | ASML HOLDING NV | Dec 31 |
| NANO | ATII Holdings Inc. | Dec 31 |
| ACLS | AXCELIS TECHNOLOGIES INC | Dec 31 |
| AZTA | Azenta, Inc. | Sep 30 |
| CRCT | Cricut, Inc. | Dec 31 |
| CVV | CVD EQUIPMENT CORP | Dec 31 |
| ERII | Energy Recovery, Inc. | Dec 31 |
| GLGI | GREYSTONE LOGISTICS, INC. | May 31 |
| LRCX | LAM RESEARCH CORP | Jun 28 |
| OCLN | ORIGINCLEAR, INC. | Dec 31 |
| SOTK | SONO TEK CORP | Feb 28 |
| TRT | TRIO-TECH INTERNATIONAL | Jun 30 |
| VECO | VEECO INSTRUMENTS INC | Dec 31 |
| VELO | Velo3D, Inc. | Dec 31 |
| 6d bytes inc. | Oct 31 |
| ABC DISPENSING TECHNOLOGIES INC | Apr 30 |
| ADEPT TECHNOLOGY INC | Jun 30 |
| ADVANCED THERMAL SCIENCES CORP | Feb 28 |
| AG ASSOCIATES INC | Sep 30 |
| AIM SAFETY CO INC | Mar 31 |
| AIXTRON SE | |
| Akrion, Inc. | Dec 31 |
| AMERICAN COMMERCE SOLUTIONS Inc | Feb 28 |
| AMISTAR CORP | Dec 31 |
| Apis Cor Inc. | Dec 31 |
| APPLIED DATA COMMUNICATIONS INC | Mar 31 |
| APPLIED SCIENCE & TECHNOLOGY INC | Jun 30 |
| APPOINT TECHNOLOGIES INC | Oct 31 |
| ASM INTERNATIONAL N V | Dec 31 |
| ASYST TECHNOLOGIES INC | Mar 31 |
| ATI LIQUIDATING, INC. | Dec 31 |
| BBHC, INC. | Dec 31 |
| BRANDT TECHNOLOGIES INC | Dec 31 |
| BTU INTERNATIONAL INC | Dec 31 |
| CFM TECHNOLOGIES INC | Oct 31 |
| COMMODORE SEPARATION TECHNOLOGIES INC | Dec 31 |
| CPAC INC | Mar 31 |
| CROPKING INC | |
| CYMER INC | Dec 31 |
| DATAMAX INTERNATIONAL CORP | Feb 28 |
| DDS TECHNOLOGIES USA INC | Dec 31 |
| Desktop Metal, Inc. | Dec 31 |
| DT INDUSTRIES INC | Jun 27 |
| DTM CORP /TX/ | Dec 31 |
| DUPONT PHOTOMASKS INC | Jun 30 |
| ECOLOMONDO Corp INC. | Dec 31 |
| ELECTROGLAS INC | May 31 |
| ETEC SYSTEMS INC | Jul 31 |
| FARREL CORP | Dec 31 |
| FORGE NANO, INC. | Dec 31 |
| Fortune Rise Acquisition Corp | Dec 31 |
| FSI INTERNATIONAL INC | Aug 27 |
| FUSION SYSTEMS CORP | Dec 31 |
| GARB OIL & POWER CORP | Dec 31 |
| GASONICS INTERNATIONAL CORP | Sep 30 |
| GENERAL SCANNING INC \MA\ | Dec 31 |
| GENUS INC | Dec 31 |
| GERBER JOSEPH H ESTATE OF | Apr 30 |
| GERBER SCIENTIFIC INC | Apr 30 |
| Global Resource CORP | Dec 31 |
| Harden Technologies Inc. | Dec 31 |
| HARVARD INTERNATIONAL TECHNOLOGIES LTD | Jul 31 |
| HEIN WERNER CORP | Dec 31 |
| HELIX TECHNOLOGY CORP | Dec 31 |
| HI RISE RECYCLING SYSTEMS INC | Dec 31 |
| ICOS VISION SYSTEMS CORP N V | Dec 31 |
| INTEGRATED PROCESS EQUIPMENT CORP | Jun 30 |
| INTEVAC INC | Dec 31 |
| IONICS INC | Dec 31 |
| KII Liquidating Inc. | Dec 31 |
| MACHINE TECHNOLOGY INC | Aug 31 |
| Manitex International, Inc. | Dec 31 |
| MATTSON TECHNOLOGY INC | Dec 31 |
| MI 2009 Inc. | Dec 31 |
| MICRION CORP /MA/ | Jun 30 |
| Milacron Holdings Corp. | Dec 31 |
| MIRAE CORP | Dec 31 |
| Mivium, Inc. | Dec 31 |
| MOBILE TIRE RENEW INTERNATIONAL INC | Mar 31 |
| MRS TECHNOLOGY INC | Mar 31 |
| NORTEM, N.V. | May 31 |
| NOVELLUS SYSTEMS INC | Dec 31 |
| ONTRAK SYSTEMS INC | Jun 30 |
| OPAL INC | Dec 31 |
| PLASMA THERM INC | Nov 30 |
| PRAB INC | Oct 31 |
| PRI AUTOMATION INC | Sep 30 |
| QUAD SYSTEMS CORP /DE/ | Sep 26 |
| QUIPP INC | Dec 31 |
| RAGEN CORP DIP | Sep 30 |
| SCANNER TECHNOLOGIES CORP | Dec 31 |
| SCVX Corp. | Dec 31 |
| SEMITOOL INC | Sep 30 |
| SILICON VALLEY GROUP INC | Sep 30 |
| SPEEDFAM IPEC INC | May 27 |
| Strasbaugh | Dec 31 |
| SUBMICRON SYSTEMS CORP | Dec 31 |
| SurePure, Inc. | Dec 31 |