CFM TECHNOLOGIES INC

Q: Jul 31 2000

Q: Apr 30 2000

Q: Jan 31 2000

Q: Jan 31 2000

FY: Oct 31 1999

Q: Jul 31 1999

Q: Apr 30 1999

Q: Jan 31 1999

FY: Oct 31 1998

Q: Jul 31 1998

Q: Apr 30 1998

Q: Jan 31 1998

FY: Oct 31 1997

FY: Oct 31 1997

Q: Jul 31 1997

Q: Apr 30 1997

Q: Jan 31 1997

Q: Jan 31 1997

FY: Oct 31 1996

Q: Sep 13 1996

5

5

Certification of termination of registration of a class of securities (Section 12(g))

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Registration statement under Securities Act of 1933

No description available

Prospectus filed under Rule 424(b)(1)

Amended Initial Registration Statement

Amended Initial Registration Statement

Registration (IPO) statement under Securities Act of 1933

Registration statement under Securities Act of 1933 to be offered to employees pursuant to certain plans

Prospectus Supplement with Pricing Information

Prospectus Supplement with Pricing Information

Amended Initial Registration Statement

Amended Initial Registration Statement

No description available

No description available

Definitive Proxy Statement

Definitive Proxy Statement

Additional Information for Proxy Statement/ Votes

Definitive Proxy Statement

Definitive Proxy Statement

Preliminary Proxy Statement

WELLINGTON MANAGEMENT CO LLP

DIMENSIONAL FUND ADVISORS INC

MCCONNELL CHRISTOPHER F

MATTSON TECHNOLOGY INC

CFM TECHNOLOGIES INC

CFM TECHNOLOGIES INC

WELLINGTON TRUST COMPANY N A

WELLINGTON MANAGEMENT CO LLP

DIMENSIONAL FUND ADVISORS INC

WELLINGTON TRUST COMPANY N A

WELLINGTON MANAGEMENT CO LLP

WELLINGTON MANAGEMENT CO LLP

EQUITABLE COMPANIES INC

EQUITABLE COMPANIES INC

PUTNAM INVESTMENTS INC

PUTNAM INVESTMENTS INC