AXCELIS TECHNOLOGIES INC

Q: Jun 30 2026

Q: Mar 31 2026

FY: Dec 31 2025

Q: Sep 30 2025

Q: Jun 30 2025

Q: Mar 31 2025

FY: Dec 31 2024

Q: Sep 30 2024

Q: Jun 30 2024

Q: Mar 31 2024

FY: Dec 31 2023

FY: Dec 31 2023

Q: Sep 30 2023

Q: Jun 30 2023

Q: Mar 31 2023

FY: Dec 31 2022

Q: Sep 30 2022

Q: Jun 30 2022

Q: Mar 31 2022

FY: Dec 31 2021

Results of Operations and Financial Condition

Results of Operations and Financial Condition

Submission of Matters to a Vote of Security Holders

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers: Compensatory Arrangements of Certain Officers

Results of Operations and Financial Condition

Submission of Matters to a Vote of Security Holders

Other Events

Other Events

Results of Operations and Financial Condition

Entry into a Material Definitive Agreement

Regulation FD Disclosure

Results of Operations and Financial Condition

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers: Compensatory Arrangements of Certain Officers

Results of Operations and Financial Condition

Regulation FD Disclosure

Other Events

Results of Operations and Financial Condition

Regulation FD Disclosure

Results of Operations and Financial Condition

2.02,9.01

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Notice of Effectiveness

Prospectus Supplement for Primary Offering

Registration statement under Securities Act of 1933 (amendment)

Registration statement under Securities Act of 1933

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Registration statement under Securities Act of 1933 to be offered to employees pursuant to certain plans

Automatic Shelf Registration

Registration statement under Securities Act of 1933 to be offered to employees pursuant to certain plans

Automatic Shelf Registration

Registration statement under Securities Act of 1933 to be offered to employees pursuant to certain plans

Registration statement under Securities Act of 1933 to be offered to employees pursuant to certain plans

Notice of Effectiveness

Definitive Proxy Statement

Definitive Proxy Statement

Definitive Proxy Statement

Preliminary Proxy Statement

Definitive Proxy Statement

Definitive Proxy Statement

Definitive Proxy Statement

Definitive Proxy Statement

Definitive Proxy Statement

Definitive Proxy Statement

Definitive Proxy Statement

Additional Information for Proxy Statement/ Votes

Additional Information for Proxy Statement/ Votes

Additional Information for Proxy Statement/ Votes

Definitive Proxy Statement

Preliminary Proxy Statement

Definitive Proxy Statement

Additional Information for Proxy Statement/ Votes

Preliminary Proxy Statement

Additional proxy soliciting materials filed by a non-management party

Tatnall Christopher

Redinbo Greg

FMR LLC

Ryzhik David

REINHART PARTNERS, LLC.

Ryzhik David

Blumenstock Gerald M

Sayiner Necip

Mahoney Robert John

Sayiner Necip

Mahoney Robert John

Sutton Todd

Sutton Todd

St Dennis Thomas

St Dennis Thomas

Evans Eileen

Blumenstock Gerald M

Evans Eileen

Blumenstock Gerald M

Tatnall Christopher

Specialized Disclosure Report

Annual Report Scanned (Paper)

Specialized Disclosure Report

Annual Report Scanned (Paper)

Specialized Disclosure Report

Annual Report Scanned (Paper)

Specialized Disclosure Report

Annual Report Scanned (Paper)

Specialized Disclosure Report

Specialized Disclosure Report

Specialized Disclosure Report

Specialized Disclosure Report

Specialized Disclosure Report

Letter from the SEC

Correspondence with the SEC

Letter from the SEC

Specialized Disclosure Report

Letter from the SEC

Correspondence with the SEC

Specialized Disclosure Report