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AXCELIS TECHNOLOGIES INC

SIC 3559 · Special Industry Machinery, NEC
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$ACLS

AXCELIS TECHNOLOGIES INC

CIK:0001113232|SEC Filings

MATERIAL CONTRACTS

EX-10.9
acls-20241231xex10d9.htm
2025-02-28T00:00:00Z
EX-10.1
acls-20241231xex10d1.htm
2025-02-28T00:00:00Z
EX-10.8
acls-20241231xex10d8.htm
2025-02-28T00:00:00Z
EX-10.9
acls-20231231xex10d9.htm
2024-02-23T00:00:00Z
EX-10.8
acls-20231231xex10d8.htm
2024-02-23T00:00:00Z
EX-10.14
acls-20231231xex10d14.htm
2024-02-23T00:00:00Z
EX-10.9
acls-20221231xex10d9.htm
2023-02-24T00:00:00Z
EX-10.15
acls-20221231xex10d15.htm
2023-02-24T00:00:00Z
EX-10.8
acls-20221231xex10d8.htm
2023-02-24T00:00:00Z
EX-10.1
acls-20220930xex10d1.htm
2022-11-03T00:00:00Z
EX-10.1
acls-20220630xex10d1.htm
2022-08-04T00:00:00Z
EX-10.9
acls-20211231xex10d9.htm
2022-02-25T00:00:00Z
EX-10.8
acls-20211231xex10d8.htm
2022-02-25T00:00:00Z
EX-10.1
acls-20210331xex10d1.htm
2021-05-06T00:00:00Z
EX-10.11
acls-20201231xex10d11.htm
2021-02-26T00:00:00Z
EX-10.12
acls-20201231xex10d12.htm
2021-02-26T00:00:00Z
EX-10.1
acls-20200930xex10d1.htm
2020-11-06T00:00:00Z
EX-10.2
acls-20200930xex10d2.htm
2020-11-06T00:00:00Z
EX-10.11
acls-20191231ex101166da8.htm
2020-03-02T00:00:00Z
EX-10.12
acls-20191231ex1012584f7.htm
2020-03-02T00:00:00Z