AXCELIS TECHNOLOGIES INC

General form for quarterly reports under Section 13 or 15(d)

Results of Operations and Financial Condition

Beneficial ownership report for a passive holder of more than 5% (Schedule 13G) (amendment)

Beneficial ownership report for a passive holder of more than 5% (Schedule 13G) (amendment)

Specialized Disclosure Report

General form for quarterly reports under Section 13 or 15(d)

Results of Operations and Financial Condition

Submission of Matters to a Vote of Security Holders

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Annual Report Scanned (Paper)

Definitive Proxy Statement

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers: Compensatory Arrangements of Certain Officers

Annual report pursuant to Section 13 or 15(d)

Results of Operations and Financial Condition

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

Submission of Matters to a Vote of Security Holders

Written communication about a business combination transaction (Rule 425)

Other Events

Written communication about a business combination transaction (Rule 425)

Other Events

Written communication about a business combination transaction (Rule 425)

Notice of Effectiveness

Prospectus Supplement for Primary Offering

Registration statement under Securities Act of 1933 (amendment)

Registration statement under Securities Act of 1933

General form for quarterly reports under Section 13 or 15(d)

Results of Operations and Financial Condition

Entry into a Material Definitive Agreement

Regulation FD Disclosure

Written communication about a business combination transaction (Rule 425)

Written communication about a business combination transaction (Rule 425)

General form for quarterly reports under Section 13 or 15(d)

Results of Operations and Financial Condition

Registration statement under Securities Act of 1933 to be offered to employees pursuant to certain plans

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers: Compensatory Arrangements of Certain Officers

General form for quarterly reports under Section 13 or 15(d)

Results of Operations and Financial Condition

Specialized Disclosure Report

Regulation FD Disclosure

Annual Report Scanned (Paper)

Definitive Proxy Statement

Other Events

Annual report pursuant to Section 13 or 15(d)

Results of Operations and Financial Condition

Regulation FD Disclosure

General form for quarterly reports under Section 13 or 15(d)

Results of Operations and Financial Condition

General form for quarterly reports under Section 13 or 15(d)

2.02,9.01

Specialized Disclosure Report

General form for quarterly reports under Section 13 or 15(d)

Annual Report Scanned (Paper)

Definitive Proxy Statement

Preliminary Proxy Statement

Annual report pursuant to Section 13 or 15(d) (amendment)

Annual report pursuant to Section 13 or 15(d)

General form for quarterly reports under Section 13 or 15(d)

General form for quarterly reports under Section 13 or 15(d)

Automatic Shelf Registration

Specialized Disclosure Report

General form for quarterly reports under Section 13 or 15(d)

Annual Report Scanned (Paper)

Definitive Proxy Statement

Annual report pursuant to Section 13 or 15(d)

General form for quarterly reports under Section 13 or 15(d)

General form for quarterly reports under Section 13 or 15(d)

Specialized Disclosure Report

General form for quarterly reports under Section 13 or 15(d)

Definitive Proxy Statement

Annual report pursuant to Section 13 or 15(d)

Specialized Disclosure Report

Definitive Proxy Statement

Registration statement under Securities Act of 1933 to be offered to employees pursuant to certain plans

Automatic Shelf Registration

Specialized Disclosure Report

Definitive Proxy Statement

Specialized Disclosure Report

Registration statement under Securities Act of 1933 to be offered to employees pursuant to certain plans

Definitive Proxy Statement

Specialized Disclosure Report

Definitive Proxy Statement

Letter from the SEC

Correspondence with the SEC

Letter from the SEC

Registration statement under Securities Act of 1933 to be offered to employees pursuant to certain plans

Specialized Disclosure Report

Notice of Effectiveness

Letter from the SEC

Correspondence with the SEC

Definitive Proxy Statement

Specialized Disclosure Report

Additional Information for Proxy Statement/ Votes

Additional Information for Proxy Statement/ Votes

Additional Information for Proxy Statement/ Votes

Definitive Proxy Statement

Preliminary Proxy Statement

Definitive Proxy Statement

Additional Information for Proxy Statement/ Votes

Preliminary Proxy Statement

Additional proxy soliciting materials filed by a non-management party

Tatnall Christopher

Redinbo Greg

Ryzhik David

Ryzhik David

Blumenstock Gerald M

Sayiner Necip

Mahoney Robert John

Sayiner Necip

Mahoney Robert John

Sutton Todd

Sutton Todd

St Dennis Thomas

St Dennis Thomas

Evans Eileen

Blumenstock Gerald M

Evans Eileen

Blumenstock Gerald M

Tatnall Christopher