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MATTSON TECHNOLOGY INC

SIC 3559 · Special Industry Machinery, NEC
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MATTSON TECHNOLOGY INC

CIK:0000928421|SEC Filings

MATERIAL CONTRACTS

EX-10.1
firstleaseamendment.htm
2016-01-13T00:00:00Z
EX-10.1
a2012_equityxincentivexplan.htm
2015-05-29T00:00:00Z
EX-10.2
exhibit102cocagreement.htm
2014-11-05T00:00:00Z
EX-10.1
amendmenttocreditagreement.htm
2014-10-23T00:00:00Z
EX-10.2
mtsn2014629-ex102.htm
2014-08-01T00:00:00Z
EX-10.19
exh10-19.htm
2012-05-11T00:00:00Z
EX-10.19
exhibit10-19.pdf
2012-05-11T00:00:00Z
EX-10.1
exh10-1.htm
2012-01-06T00:00:00Z
EX-10.1
exhibit10-1.pdf
2012-01-06T00:00:00Z
EX-10.2
exhibit10-2.pdf
2011-11-07T00:00:00Z
EX-10.1
exh10-1.htm
2011-11-07T00:00:00Z
EX-10.2
exh10-2.htm
2011-11-07T00:00:00Z
EX-10.1
exhibit10-1.pdf
2011-11-07T00:00:00Z
EX-10.2
exhibit10-2.pdf
2011-06-01T00:00:00Z
EX-10.1
exh10-1.htm
2011-06-01T00:00:00Z
EX-10.2
exh10-2.htm
2011-06-01T00:00:00Z
EX-10.1
exhibit10-1.pdf
2011-06-01T00:00:00Z
EX-10.5
exh10-5.htm
2011-03-11T00:00:00Z
EX-10.5
exhibit10-5.pdf
2011-03-11T00:00:00Z
EX-10.1
exhibit10-1.pdf
2010-06-10T00:00:00Z