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SEC Edgar

MATTSON TECHNOLOGY INC

SIC 3559 · Special Industry Machinery, NEC
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MATTSON TECHNOLOGY INC

CIK:0000928421|SEC Filings

INDENTURES

EX-4.1
ex41-mattsonxrightsagreeme.htm
2015-05-05T00:00:00Z
EX-4.3
dex43.htm
2003-12-23T00:00:00Z
EX-4.5
dex45.htm
2003-12-23T00:00:00Z
EX-4.5
exhibit4-5.pdf
2010-07-21T00:00:00Z
EX-4.1
exhibit4-1.pdf
2010-07-21T00:00:00Z
EX-4.7
exhibit4-7.pdf
2010-07-21T00:00:00Z
EX-4.7
exh4-7.htm
2010-07-21T00:00:00Z
EX-4.1
exh4-1.htm
2010-07-21T00:00:00Z
EX-4.5
exh4-5.htm
2010-07-21T00:00:00Z
EX-4.7
exhibit4-7.pdf
2008-08-01T00:00:00Z
EX-4.7
exh4-7.htm
2008-08-01T00:00:00Z
EX-4.7
exhibit4-7.pdf
2008-07-16T00:00:00Z
EX-4.7
exh4-7.htm
2008-07-16T00:00:00Z
EX-4.6
exh4-6.htm
2007-03-02T00:00:00Z
EX-4.6
exhibit4-6.pdf
2007-03-02T00:00:00Z
EX-4.1
exh4-1.htm
2005-12-16T00:00:00Z
EX-4.1
exhibit4-1.pdf
2005-12-16T00:00:00Z
EX-4.1
a05-14052_1ex4d1.htm
2005-08-02T00:00:00Z
EX-4.1
EX-4.1.txt
1999-05-06T00:00:00Z
EX-4.1
EX-4.1.txt
1997-10-31T00:00:00Z