MATTSON TECHNOLOGY INC

Beneficial ownership report for a passive holder of more than 5% (Schedule 13G) (amendment)

Certification of termination of registration of a class of securities (Section 12(g))

Notice of Effectiveness

Notice of Effectiveness

Post Effective Amendment to S-8

Post-effective amendment to a registration statement

Post-effective amendment to a registration statement

Post Effective Amendment to S-8

Post Effective Amendment to S-8

Post Effective Amendment to S-8

Post Effective Amendment to S-8

Post Effective Amendment to S-8

Post Effective Amendment to S-8

Post Effective Amendment to S-8

Post Effective Amendment to S-8

Post Effective Amendment to S-8

Post Effective Amendment to S-8

Post Effective Amendment to S-8

Post Effective Amendment to S-8

Post Effective Amendment to S-8

Completion of Acquisition or Disposition of Assets

Notification of removal from listing and/or registration on a national securities exchange

General form for quarterly reports under Section 13 or 15(d)

Annual report pursuant to Section 13 or 15(d) (amendment)

5.07,9.01

Additional Information for Proxy Statement/ Votes

Annual report pursuant to Section 13 or 15(d)

No description available

Beneficial ownership report for a passive holder of more than 5% (Schedule 13G) (amendment)

Beneficial ownership report for a passive holder of more than 5% (Schedule 13G) (amendment)

2.02,9.01

No description available

Beneficial ownership report for a passive holder of more than 5% (Schedule 13G)

1.01,9.01

1.01,8.01,9.01

Additional Information for Proxy Statement/ Votes

General form for quarterly reports under Section 13 or 15(d)

Results of Operations and Financial Condition

General form for quarterly reports under Section 13 or 15(d)

2.02,9.01

5.07,9.01

Specialized Disclosure Report

General form for quarterly reports under Section 13 or 15(d)

1.01,3.03,5.03,9.01

2.02,9.01

Additional Information for Proxy Statement/ Votes

Definitive Proxy Statement

Annual report pursuant to Section 13 or 15(d)

2.02,9.01

General form for quarterly reports under Section 13 or 15(d)

Results of Operations and Financial Condition

Entry into a Material Definitive Agreement

General form for quarterly reports under Section 13 or 15(d)

2.02,9.01

Submission of Matters to a Vote of Security Holders

Specialized Disclosure Report

General form for quarterly reports under Section 13 or 15(d)

Entry into a Material Definitive Agreement

Results of Operations and Financial Condition

Additional Information for Proxy Statement/ Votes

Definitive Proxy Statement

Changes in Registrant's Certifying Accountant

Annual report pursuant to Section 13 or 15(d)

8.01,9.01

2.02,9.01

General form for quarterly reports under Section 13 or 15(d)

Correspondence with the SEC

Correspondence with the SEC

Letter from the SEC

General form for quarterly reports under Section 13 or 15(d)

General form for quarterly reports under Section 13 or 15(d)

Definitive Proxy Statement

Additional Information for Proxy Statement/ Votes

Annual report pursuant to Section 13 or 15(d)

General form for quarterly reports under Section 13 or 15(d)

General form for quarterly reports under Section 13 or 15(d) (amendment)

General form for quarterly reports under Section 13 or 15(d)

General form for quarterly reports under Section 13 or 15(d)

Definitive Proxy Statement

Additional Information for Proxy Statement/ Votes

Annual report pursuant to Section 13 or 15(d)

Definitive Proxy Statement

Letter from the SEC

Correspondence with the SEC

Correspondence with the SEC

Letter from the SEC

Letter from the SEC

Definitive Proxy Statement

Definitive Proxy Statement

Definitive Proxy Statement

Definitive Proxy Statement

Definitive Proxy Statement

Annual Report Scanned (Paper)

Definitive Proxy Statement

Definitive Proxy Statement

06

SMITH KENNETH G

HOANG HOANG

Purvis Tyler Wayne

DODSON J MICHAEL

CHEN FUSEN ERNIE

St Dennis Thomas

KRAMER SCOTT STEUBEN

Dyck Richard E.

Peterson Douglas Scott

KANNAPPAN S KENNETH

Purvis Tyler Wayne

CHEN FUSEN ERNIE

DODSON J MICHAEL

HOANG HOANG

CHEN FUSEN ERNIE

DODSON J MICHAEL