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SEC Edgar

AMTECH SYSTEMS INC

SIC 3559 · Special Industry Machinery, NEC
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$ASYS

AMTECH SYSTEMS INC

CIK:0000720500|SEC Filings

MATERIAL CONTRACTS

EX-10.1
exhibit10-1.htm
2011-04-26T00:00:00Z
EX-10.2
exhibit10-2.htm
2010-03-17T00:00:00Z
EX-10.1
exhibit10-1.htm
2010-03-17T00:00:00Z
EX-10.4
exhibit10-4.htm
2010-03-17T00:00:00Z
EX-10.3
exhibit10-3.htm
2010-03-17T00:00:00Z
EX-10.2
as120666ex102.htm
2007-05-15T00:00:00Z
EX-10.1
as120666ex101.htm
2007-05-15T00:00:00Z
EX-10.4
as120666ex104.htm
2006-08-14T00:00:00Z
EX-10.3
as120666ex103.htm
2006-04-12T00:00:00Z
EX-10.2
as120666ex102.htm
2006-04-12T00:00:00Z
EX-10.1
as120666ex101.htm
2006-04-12T00:00:00Z
EX-10.15
am111270ex1015.htm
2005-12-29T00:00:00Z
EX-10.3
am111270ex103.htm
2005-12-29T00:00:00Z
EX-10.1
asys-ex10_1.htm
2026-05-07T00:00:00Z
EX-10.1
asys-ex10_1.htm
2026-04-30T00:00:00Z
EX-10.1
asys-ex10_1.htm
2026-02-05T00:00:00Z
EX-10.5
asys-ex10_5.htm
2025-12-10T00:00:00Z
EX-10.6
asys-ex10_6.htm
2025-12-10T00:00:00Z
EX-10.2
d862250dex102.htm
2015-02-02T00:00:00Z
EX-10.1
d862250dex101.htm
2015-02-02T00:00:00Z