Institutional HoldersBeta

Who holds a company, from every 13F filed for the quarter, one row per filer exactly as filed, against the latest share count the company reported.

AMTECH SYSTEMS INC

CIK 0000720500ASYS· quarter ending 2026-06-30
Shares outstanding
17,508,101
Held by 13F filers
11,309,450
64.6% of shares outstanding
Holders
111
+32 vs 2026-03-31 · 45 new, 13 exited
Value
$260.9M
shares +51.4% vs prior quarter

Share classes (cover page of the 10-Q filed 2026-08-05, as of 2026-07-31)

ClassListedShares outstandingHeld by 13F filers% of classHoldersCUSIP
Common stockASYS · NASDAQ17,508,10111,309,45064.6%111032332504

Each class is compared with its own share count; classes are not added together. A class that is not exchange-listed cannot be held by 13F filers.

Securities (CUSIPs held in 13F this quarter)

tick to combine
CountCUSIPClass (as filers write it)HoldersShares heldClass shares% of classValueOptionsMapped via
032332504COM PAR $0.01N11111,309,45017,508,10164.6%$261.1M4 call / 3 put13DGholders →

Totals combine the ticked CUSIPs and update as you tick: common-stock classes by default; preferreds, notes, warrants and depositary shares are listed but not counted. "holders →" shows a single CUSIP on its own. Bonds are held as a principal amount, not shares. Options positions are never counted as holdings.

Top holders (111 of 111 · 032332504)

change vs 2026-03-31
#FilerShares% of classValueChange
1First Eagle Investment Management, LLC1,696,8529.69%$39.2M+864,399 (+103.8%)
2AIGH Capital Management LLC1,252,0007.15%$28.9MNEW
3BlackRock, Inc.763,4874.36%$17.6M+618,041 (+424.9%)
4AWM Investment Company, Inc.690,0003.94%$15.9MNEW
5VANGUARD CAPITAL MANAGEMENT LLC580,5023.32%$13.4M+16,175 (+2.9%)
6ACADIAN ASSET MANAGEMENT LLC580,2783.31%$13.4M+113,441 (+24.3%)
7DIMENSIONAL FUND ADVISORS LP426,6942.44%$9.8M-102,657 (-19.4%)
8MARSHALL WACE, LLP398,5642.28%$9.2M-18,512 (-4.4%)
9ARROWSTREET CAPITAL, LIMITED PARTNERSHIP308,8961.76%$7.1M-56,491 (-15.5%)
10GEODE CAPITAL MANAGEMENT, LLC284,8361.63%$6.6M+152,687 (+115.5%)
11Connor, Clark & Lunn Investment Management Ltd.282,3881.61%$6.5M+108,229 (+62.1%)
12RENAISSANCE TECHNOLOGIES LLC260,6051.49%$6.0M+152,509 (+141.1%)
13TWO SIGMA INVESTMENTS, LP254,3671.45%$5.9M-12,489 (-4.7%)
14JANE STREET GROUP, LLC249,4651.42%$5.8M-91,414 (-26.8%)
15Regal Partners Ltd237,5031.36%$5.5MNEW
16Qube Research & Technologies Ltd194,7141.11%$4.5M+106,197 (+120.0%)
17STATE STREET CORP155,8490.89%$3.6M+98,509 (+171.8%)
18Trexquant Investment LP119,7500.68%$2.8M-54,139 (-31.1%)
19BRIDGEWAY CAPITAL MANAGEMENT, LLC111,4720.64%$2.6M+2,354 (+2.2%)
20CITADEL ADVISORS LLC106,2460.61%$2.5M-668 (-0.6%)
21Palisades Investment Partners, LLC102,6910.59%$2.4M+2,035 (+2.0%)
22NORTHERN TRUST CORP91,8570.52%$2.1M+52,853 (+135.5%)
23MILLENNIUM MANAGEMENT LLC90,6260.52%$2.1M-362,971 (-80.0%)
24MORGAN STANLEY82,9990.47%$1.9M+23,907 (+40.5%)
25VANGUARD FIDUCIARY TRUST CO81,8050.47%$1.9M+18,509 (+29.2%)
26VANGUARD PORTFOLIO MANAGEMENT LLC81,3510.46%$1.9MNEW
27Point72 Asset Management, L.P.79,6840.46%$1.8M+49,926 (+167.8%)
28UBS Group AG79,0850.45%$1.8M+6,611 (+9.1%)
29Informed Momentum Co LLC72,5790.41%$1.7M-1,726 (-2.3%)
30BNP PARIBAS FINANCIAL MARKETS71,2930.41%$1.6M+7,752 (+12.2%)
31XTX Topco Ltd69,8320.40%$1.6M-4,774 (-6.4%)
32LOS ANGELES CAPITAL MANAGEMENT LLC63,5620.36%$1.5MNEW
33O'SHAUGHNESSY ASSET MANAGEMENT, LLC54,8290.31%$1.3M+4,102 (+8.1%)
34GOLDMAN SACHS GROUP INC54,0660.31%$1.2M+17,491 (+47.8%)
35Capelight Capital Asset Management LP50,0000.29%$1.2MNEW
36SEI INVESTMENTS CO49,5010.28%$1.1M-43,014 (-46.5%)
37Man Group plc45,2240.26%$1.0M+13,553 (+42.8%)
38NEW YORK STATE COMMON RETIREMENT FUND44,0090.25%$1.0M+2,500 (+6.0%)
39Hillsdale Investment Management Inc.43,0800.25%$994K+17,780 (+70.3%)
40SUSQUEHANNA INTERNATIONAL GROUP, LLP42,8420.24%$989K-91,096 (-68.0%)
41Bank of New York Mellon Corp41,5330.24%$959KNEW
42RITHOLTZ WEALTH MANAGEMENT41,3740.24%$955K+1,253 (+3.1%)
43OCCUDO QUANTITATIVE STRATEGIES LP38,6160.22%$891K+18,786 (+94.7%)
44Engineers Gate Manager LP38,5520.22%$890K+972 (+2.6%)
45GSA CAPITAL PARTNERS LLP37,8140.22%$873K+12,184 (+47.5%)
46ESSEX INVESTMENT MANAGEMENT CO LLC37,7610.22%$872K-55 (-0.1%)
47Merit Financial Group, LLC37,0000.21%$854K—
48Empowered Funds, LLC34,6720.20%$800K+2,354 (+7.3%)
49AMERICAN CENTURY COMPANIES INC34,5360.20%$797K+7,800 (+29.2%)
50Janney Montgomery Scott LLC30,7600.18%$710K—
51Optimus Capital Advisors, LLC30,0000.17%$692KNEW
52Y-Intercept (Hong Kong) Ltd29,5330.17%$682KNEW
53CHARLES SCHWAB INVESTMENT MANAGEMENT INC28,4680.16%$657KNEW
54WINTON GROUP Ltd28,3500.16%$654KNEW
55IRONWOOD INVESTMENT MANAGEMENT LLC27,1930.16%$628K-5 (-0.0%)
56Marex Group Ltd26,1180.15%$603KNEW
57Panoramic Capital, LLC25,0000.14%$577KNEW
58SHIKIAR ASSET MANAGEMENT INC22,0750.13%$509KNEW
59Dynamic Technology Lab Private Ltd21,3800.12%$493K-6,761 (-24.0%)
60Nuveen, LLC20,6810.12%$477KNEW
61Sowell Financial Services LLC20,2060.12%$466K—
62VILLERE ST DENIS J & CO LLC20,0000.11%$462K—
63Schonfeld Strategic Advisors LLC18,9760.11%$438K+172 (+0.9%)
64LPL Financial LLC18,0260.10%$416K-987 (-5.2%)
65WealthTrust Axiom LLC17,8000.10%$411K+1,500 (+9.2%)
66KTF INVESTMENTS, LLC17,0000.10%$392KNEW
67NewEdge Advisors, LLC15,8230.09%$365K-11,068 (-41.2%)
68Integrated Quantitative Investments LLC15,3590.09%$354KNEW
69De Lisle Partners LLP15,0000.09%$346KNEW
70JAMES INVESTMENT RESEARCH, INC.14,6000.08%$337K—
71STATE OF WISCONSIN INVESTMENT BOARD13,6000.08%$314KNEW
72JPMORGAN CHASE & CO12,0380.07%$248K+11,780 (+4565.9%)
73RHUMBLINE ADVISERS11,9870.07%$277KNEW
74DEUTSCHE BANK AG\11,6470.07%$269KNEW
75VIRTUS ADVISERS, LLC11,4810.07%$265K+281 (+2.5%)
76WELLS FARGO & COMPANY/MN10,6850.06%$247KNEW
77ExodusPoint Capital Management, LP10,5570.06%$244KNEW
78State of Wyoming10,1700.06%$235K-13,518 (-57.1%)
79ALLIANCEBERNSTEIN L.P.10,0000.06%$117KNEW
80PRICE T ROWE ASSOCIATES INC /MD/9,7470.06%$225KNEW
81Truvestments Capital LLC9,2650.05%$214K+275 (+3.1%)
82Invesco Ltd.9,2600.05%$214KNEW
83Legato Capital Management LLC8,8980.05%$205KNEW
84STRS OHIO7,9000.05%$182KNEW
85MetLife Investment Management, LLC7,0460.04%$163KNEW
86CITIGROUP INC5,4900.03%$127KNEW
87MIRAE ASSET GLOBAL ETFS HOLDINGS Ltd.5,3930.03%$124KNEW
88OSAIC HOLDINGS, INC.4,2950.02%$99K+3,957 (+1170.7%)
89Vanguard Global Advisers, LLC4,2820.02%$99K—
90SIMPLEX TRADING, LLC4,2300.02%$98KNEW
91GROUP ONE TRADING LLC4,1700.02%$96K+859 (+25.9%)
92BARCLAYS PLC3,7140.02%$86K-7,610 (-67.2%)
93Police & Firemen's Retirement System of New Jersey3,4550.02%$80KNEW
94Kemnay Advisory Services Inc.2,2500.01%$52KNEW
95Farther Finance Advisors, LLC1,7000.01%$39KNEW
96Russell Investments Group, Ltd.1,1760.01%$27K+936 (+390.0%)
97Legal & General Group Plc1,1360.01%$26KNEW
98Ameritas Investment Partners, Inc.1,0630.01%$25KNEW
99Tower Research Capital LLC (TRC)6320.00%$15K-1,309 (-67.4%)
100Strengthening Families & Communities, LLC4900.00%$11K—
101SBI Securities Co., Ltd.4820.00%$11K+452 (+1506.7%)
102ROYAL BANK OF CANADA3650.00%$8K+174 (+91.1%)
103FMR LLC2610.00%$6K+19 (+7.9%)
104Arax Advisory Partners2270.00%$5KNEW
105FIRST UNITED BANK & TRUST2200.00%$5KNEW
106Parallel Advisors, LLC2000.00%$5KNEW
107CALIFORNIA STATE TEACHERS RETIREMENT SYSTEM1610.00%$4KNEW
108JONES FINANCIAL COMPANIES LLLP1180.00%$2KNEW
109Sterling Capital Management LLC410.00%$946NEW
110Horrell Capital Management, Inc.250.00%$1KNEW
111Caitong International Asset Management Co., Ltd40.00%$92NEW
Exited since 2026-03-31 (13 filers; largest 13 shown)
Pacific Ridge Capital Partners, LLC−405,371
Squarepoint Ops LLC−38,690
Hudson Bay Capital Management LP−24,083
Brevan Howard Capital Management LP−23,714
BANK OF AMERICA CORP /DE/−22,652
Virtu Financial LLC−21,210
HRT FINANCIAL LP−20,181
Jump Financial, LLC−13,280
Walleye Capital LLC−12,197
Kovack Advisors, Inc.−12,100
OMERS ADMINISTRATION Corp−10,400
IFP Advisors, Inc−1,019
CWM, LLC−301

Large holders from 13D/13G (latest per reporting person, last 2 years)

Filed when a holder crosses 5% or changes materially, so often more current than the quarter-end 13F. Percentages are the filer's own, against the share count they used.

Reporting personFormFiledEventShares% of class
First Eagle Investment Management, LLCSCHEDULE 13G/A2026-08-062026-06-30848,6974.9%
AIGH Capital Management LLCSCHEDULE 13G2026-07-272026-06-301,252,0007.2%
Orin HirschmanSCHEDULE 13G2026-07-272026-06-301,252,0007.2%
Cornice Fiduciary Management LLC, as Trustee under Trust Agreement dated December 23, 1989 FBO the issue of Jonathan D. SacklerSCHEDULE 13D/A2026-06-022026-06-011,386,3129.6%
M3C Holdings LLCSCHEDULE 13D/A2026-06-022026-06-01263,6881.8%
OIH LLCSCHEDULE 13D/A2026-06-022026-06-0122,9170.2%
Piton Capital Partners LLCSCHEDULE 13D/A2026-06-022026-06-01600,0004.1%
Robert AverickSCHEDULE 13D/A2026-06-022026-06-012,986,34120.6%
Wax Asset Management, LLCSCHEDULE 13G/A2026-02-132025-12-311,319,7739.2%
Dimensional Fund Advisors LPSCHEDULE 13G/A2026-01-212025-12-31672,1074.7%
ROYCE & ASSOCIATES LPSCHEDULE 13G/A2025-04-042025-03-31587,9864.11%
Pacific Ridge Capital Partners, LLCSCHEDULE 13G/A2025-02-122024-12-31652,3934.6%

Source: SEC Form 13F-HR information tables for the quarter ending 2026-06-30 (filed within 45 days of quarter end; amendments applied; values normalised to dollars), the share count from the company's latest 10-K/10-Q XBRL cover page, and Schedule 13D/13G filings. Each row is a legal 13F filer as filed — related entities (e.g. Vanguard's advisers) are not merged. Retail brokerage accounts are not reported on 13F, so the remainder is mostly retail and insiders.