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SEC Edgar

AMTECH SYSTEMS INC

SIC 3559 · Special Industry Machinery, NEC
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$ASYS

AMTECH SYSTEMS INC

CIK:0000720500|SEC Filings

INDENTURES

EX-4.2
asys-ex42_13.htm
2020-11-19T00:00:00Z
EX-4.2
asys-ex42_608.htm
2019-11-21T00:00:00Z
EX-4.14
exhibit4-14.htm
2011-02-08T00:00:00Z
EX-4.1
exhibit4-1.htm
2008-12-15T00:00:00Z
EX-4.3
as120666ex43.htm
2006-12-21T00:00:00Z
EX-4.1
asys-ex4_1.htm
2025-12-10T00:00:00Z
EX-4.1
dex41.htm
2005-04-28T00:00:00Z
EX-4.1
asys-ex4_1.htm
2024-12-12T00:00:00Z
EX-4.1
asys-ex4_1.htm
2023-12-14T00:00:00Z
EX-4.1
asys-ex4_1.htm
2022-11-30T00:00:00Z
EX-4.1
asys-ex4_1.htm
2021-11-17T00:00:00Z
EX-4.9
0004.txt
2000-10-02T00:00:00Z
EX-4.7
0002.txt
2000-10-02T00:00:00Z
EX-4.8
0003.txt
2000-10-02T00:00:00Z
EX-4.2
asys-ex4_2.htm
2026-03-13T00:00:00Z
EX-4.1
asys-ex4_1.htm
2026-03-13T00:00:00Z
EX-4.9
exhibit49.htm
2017-02-02T00:00:00Z
EX-4.1
amendedandrestatedrightsag.htm
2015-10-05T00:00:00Z