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SEC Edgar

ZYGO CORP

SIC 3827 · Optical Instruments & Lenses
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ZYGO CORP

CIK:0000730716|SEC Filings

MATERIAL CONTRACTS

EX-10.30
EX-10.30.txt
1997-09-16T00:00:00Z
EX-10.33
EX-10.33.txt
1997-09-16T00:00:00Z
EX-10.32
EX-10.32.txt
1997-09-16T00:00:00Z
EX-10.31
EX-10.31.txt
1997-09-16T00:00:00Z
EX-10.16
EX-10.16.txt
1997-09-16T00:00:00Z
EX-10.23
EX-10.23.txt
1997-09-16T00:00:00Z
EX-10.29
EX-10.29.txt
1997-09-16T00:00:00Z
EX-10.31
EX-10.31.txt
1995-10-27T00:00:00Z
EX-10.21
e89840_ex10-21.txt
2002-09-20T00:00:00Z
EX-10.22
e89840_ex10-22.txt
2002-09-20T00:00:00Z
EX-10.25
e89840_ex10-25.txt
2002-09-20T00:00:00Z
EX-10.23
e89840_ex10-23.txt
2002-09-20T00:00:00Z
EX-10.24
e89840_ex10-24.txt
2002-09-20T00:00:00Z
EX-10.26
e86574_ex10-26.txt
2001-09-28T00:00:00Z
EX-10.22
0002.txt
2000-09-27T00:00:00Z
EX-10.2
EX-10.2.txt
2000-02-11T00:00:00Z
EX-10.1
EX-10.1.txt
2000-02-11T00:00:00Z
EX-10.4
c77265_ex10-4.htm
2014-04-15T00:00:00Z
EX-10.3
c77265_ex10-3.htm
2014-04-15T00:00:00Z
EX-10.2
c77265_ex10-2.htm
2014-04-15T00:00:00Z