Exhibit 21
SUBSIDIARIES OF THE REGISTRANT
| SUBSIDIARY |
STATE OR OTHER JURISDICTION OF OPERATION | |
| Lam Research AG | Austria | |
| Lam Research Management GmbH | Austria | |
| Novellus Systems Export, Inc. | Barbados | |
| IPEC FSC Ltd | Barbados | |
| IPEC International Sales FSC Ltd | Barbados | |
| Novellus Systems, Inc. | California, United States | |
| Novellus Systems International, LLC | California, United States | |
| Angstron Systems, Inc. | California, United States | |
| Gamma Precision Technology | California, United States | |
| Lam Research International Holdings Ltd. | Cayman Islands | |
| Lam Research (Shanghai) Co., Ltd. | China | |
| Lam Research Semiconductor (Suzhou) Co., Ltd. | China | |
| Lam Research Service Co., Ltd. | China | |
| Novellus Systems Semiconductor Equipment Shanghai Co. Ltd. | China | |
| Novellus Systems International Trading (Shanghai) Co. Ltd. | China | |
| Peter Wolters Precision Machinery (Shanghai) Co., Ltd. | China | |
| Lam Research International Holding Company | Delaware, United States | |
| Novellus International Holdco, LLC. | Delaware, United States | |
| SpeedFam-IPEC International Services, LLC | Delaware, United States | |
| Tmation Inc. | Delaware, United States | |
| Novellus Development Company, LLC | Delaware, United States | |
| Silfex, Inc. | Delaware, United States | |
| Lam Research SAS | France | |
| Novellus Singapore Pte. Ltd., France Branch | France | |
| Lam Research GmbH | Germany | |
| NHL Sub GmbH | Germany | |
| Peter Wolters GmbH | Germany | |
| Lam Research (H.K.) Limited | Hong Kong | |
| Novellus Systems Service (Hong Kong) Limited | Hong Kong | |
| Peter Wolters of America, Inc. | Illinois, United States | |
| Lam Research (India) Private Ltd. | India | |
| Peter Wolters Precision Solutions (India) Pvt. Ltd. | India | |
| Lam Research (Ireland) Limited | Ireland | |
| Novellus Systems Ireland Ltd. | Ireland | |
| Lam Research (Israel) Ltd. | Israel | |
| Lam Research Services Ltd. | Israel | |
| GaSonics Israel Ltd. | Israel | |
| Novellus Systems International BV, Israel Branch | Israel | |
| Lam Research S.r.l. | Italy | |
| Novellus Systems Italy SRL | Italy | |
| Lam Research Co., Ltd. | Japan | |
| Peter Wolters Japan Co., Ltd. | Japan |
| SUBSIDIARY |
STATE OR OTHER JURISDICTION OF OPERATION | |
| Novellus Singapore Pte. Ltd., Japan Branch | Japan | |
| Lam Research Luxembourg S.à.r.l. | Luxembourg | |
| SpeedFam IPEC (Malaysia) Sdn. Bhd. | Malaysia | |
| Lam Research Malaysia Sdn. Bhd. | Malaysia | |
| LAM Research B.V. | Netherlands | |
| Lam Research International B.V. | Netherlands | |
| Peter Wolters International Holding Company B.V. | Netherlands | |
| Novellus Systems International B.V. | Netherlands | |
| Voumard, Inc. | New York, United States | |
| Lam Research Korea Limited | Republic of Korea | |
| Lam Research Korea LLC YH | Republic of Korea | |
| Novellus Singapore Pte. Ltd., Korea Branch | Republic of Korea | |
| Lam Research Singapore Pte Ltd | Singapore | |
| SEZ Asia Pacific Pte. Ltd. (in liquidation) | Singapore | |
| Novellus Systems International BV, Singapore Branch | Singapore | |
| Novellus Singapore Pte. Ltd. | Singapore | |
| Novellus Singapore Holdings Pte. Ltd. | Singapore | |
| Lam Research Holding GmbH | Switzerland | |
| Lam Research International Sàrl | Switzerland | |
| Novellus Systems (Schweiz) Holding GmbH | Switzerland | |
| Voumard Machines Co SARL | Switzerland | |
| Lam Research Co., Ltd. | Taiwan | |
| Lam Research (H.K.) Limited, Taiwan Branch | Taiwan | |
| Novellus Systems Service (Hong Kong) Limited, Taiwan Branch | Taiwan | |
| Lam Research Ltd. | United Kingdom | |
| Peter Wolters UK Ltd. | United Kingdom | |
| Novellus Systems UK Limited | United Kingdom | |
| Novellus Vietnam LLC | Vietnam |